Miniature lead screw drives in the semiconductor industry

For use in the semiconductor industry, Feinmess Suhl offers precise and ultra-compact sliding screw drives that operate without lubricants. (Image: Feinmess Suhl GmbH)

In high-end applications in semiconductor technology, electronics, or research and development, miniaturization and automation are continuously advancing. Positioning and drive systems must operate precisely, cleanly, reliably, and with low maintenance under extreme environmental conditions. The Feinmess Suhl GmbH, part of the Steinmeyer Group, develops compact, robust, and durable miniature linear actuators that can be customized according to customer requirements.

When components, parts, or assemblies are used in demanding environments such as vacuum, extremely dry air or nitrogen, noble gas atmospheres, or cleanrooms, special expertise is required in material selection. The linear actuators are optionally made from brass, steel, or stainless steel in Suhl — special coatings, lubricants, or maintenance-free operation are also possible.

PEEK & Stainless Steel

In demanding applications in the semiconductor industry (HV, DUV, EUV), the combination of a non-rusting stainless steel spindle with a PEEK nut has proven effective. "In ultra-dry nitrogen or high vacuum, good sliding properties and minimal particle generation are required," explains Development Manager Detlef Rode. "Our high-performance plastic is enriched with lubricating fillers, has low outgassing values, and thus represents a sensible alternative to greases or oils." With this innovative material pairing, optimal sliding ability, reduced friction and heat dissipation, as well as high mechanical stability and durability can be achieved without additional lubricants. The system is also ideally suited for dry operation up to cleanroom class ISO3 and 10E-9 mbar.

Ultracompact and Highly Precise

"Our ultracompact linear actuators, with a spindle diameter of just 3 mm and a length of 112 mm, are among the smallest on the market," Rode continues. They achieve accuracy up to ISO tolerance class 3 — class 1 is also available upon request — and can be used in a temperature range from -196°C to 140°C. "Such precision in this size is unique and cannot be achieved with ball screw drives in dry operation." Furthermore, the robust linear actuators offer simple construction, self-locking, high stiffness, as well as precise form and dimensional accuracy.

Assemblies Customized to Customer Requirements

The spindle of the linear actuators is rolled or cold formed. This seamless process produces a high surface quality through cold forming. Steinmeyer manufactures various types, sizes, directions of threads, and gear ratios with a pitch of ≥ 0.1 mm and a stroke of up to 300 mm based on customer specifications. Additionally, the manufacturer offers nut variants with a wide range of options regarding design, preload, or backlash.