Flat turntables for wafer handling

The flat Steinmeyer rotary tables enable efficient, economical, and at the same time very space-saving wafer handling. (Image: Steinmeyer Group)

The Steinmeyer Group is recognized as a leading specialist in the design, development, and manufacturing of sophisticated positioning solutions for wafer and chip production. An example includes the rotary tables of the DT200 and DT310 series. These highly precise rotation systems are flat, cleanroom-compatible, maintenance-free, customizable, and enable efficient, cost-effective, and space-saving wafer handling.

Rotary tables or rotation stages can precisely position samples and components at a defined angle. Depending on the application, they are equipped with an optimal drive and measurement system. In the cleanroom environments of the semiconductor industry, additional requirements are added, especially regarding particle reduction, radiation resistance, compactness, and maintenance-free operation. The rotary tables of the DT200 and DT310 series from Steinmeyer meet these requirements 100% and are an ideal solution for handling wafers up to a size of 8" / 200 mm (DT200) or 12" / 300 mm (DT310).

Excellent accuracy values with minimal space requirements

Characterized by their flat design (DT200 = 40 mm, DT310 = 60 mm). This significantly reduces the space required for system developers. The highly precise rotational movement with steps up to ± 0.004° ensures accurate wafer alignment and guarantees the highest quality with minimal rejection rates. The large aperture (diameter 66 to 100 mm) provides enough space for integrating rotary feedthroughs, transmission measurement, and layer thickness measurement.

The rotary tables can accommodate samples including mounts weighing 6 to 12 kg and are equipped with a standard DC motor. An optional stepper motor or AC servo with motor encoder and various measurement system options is available, such as a high-resolution optical angle measurement system for precise position measurement. The control is via customer-specific interfaces (DLL, API), a ready-to-use motion controller with sample software, or integration into PLC architectures or ACS environments.

Cleanroom-compatible rotary tables with excellent adaptability

Due to their complete enclosure, the proven rotary table series features low particle emission and is therefore ideal for use in cleanrooms (variants up to ISO 5 cleanroom class, optionally up to ISO 1 upon request). The systems operate maintenance-free in 24/7 operation and can be easily integrated into existing systems thanks to customer-specific adapters, covers, and accessories. The chuck interface can also be modified and adapted to application-specific requirements, such as custom drilling patterns, contact surfaces with increased parallelism, integrated rotary feedthroughs, or quick-change interfaces.

There are also no restrictions regarding surface finish and radiation resistance. Whether anodized cleaned, bare aluminum, Bilatal, or nickel for optimal process suitability (e.g., very high purity levels, chemical resistance in life sciences), whether UV, DUV, or EUV (X-ray, gamma radiation upon request): Steinmeyer’s DT200 and DT310 series rotary tables are perfectly equipped for all requirements and environmental conditions.