Double-XYZ Wafer Positioner for the Semiconductor Industry

The double-XYZ wafer positioner from Steinmeyer Mechatronik enables double throughput in the smallest footprint. (Copyright: Steinmeyer Mechatronik GmbH)

The compact inspection portal features a total of four cleanroom axes and allows for automated inspection of multiple objects simultaneously. (Copyright: Steinmeyer Mechatronik GmbH)

With the double-XYZ wafer positioner, Steinmeyer Mechatronik offers a highly efficient solution for the analysis and inspection of large wafers up to 12 inches or 300 mm. The inspection portal with a total of four cleanroom axes allows the automated inspection of multiple objects simultaneously and ensures maximum efficiency.

The double-XYZ wafer positioner from Steinmeyer Mechatronik features two X-axes for scanners or microscopes weighing up to 10 kg, as well as two Y-axes for chucks up to 15 kg, enabling the inspection of both sides on a single system. The fully operational axis system is designed for use in three-shift operation up to ISO 2 cleanroom class, built to be extremely compact, low-maintenance, and customizable to customer specifications.

High-throughput screening of wafers up to 12 inches

Whether wafers up to 12 inches or 300 mm, probe cards, or circuit boards: With the double-XYZ wafer positioner from Steinmeyer Mechatronik, large substrates can be examined quickly and precisely. Non-ferrous direct drives enable highly dynamic movements with peak speeds of up to 1,000 mm/s over travel distances of up to 720 mm. The high sample throughput ensures rapid analysis and thus short cycle times. Despite the doubled throughput, the installation area remains very small due to the compact design. The foundation for the four cleanroom axes is a massive, heavy granite plate, achieving excellent operational values. Thanks to a repeatability of 0.3 µm, precise measurement results and significant quality improvements can be achieved.

High degree of customization

The inspection system is delivered with fully calibrated accuracy, including cable management, motion controller, and mounting holes for housing attachments. Different engineering services and application-specific adjustments allow for a tailored configuration. The vertical adjustment can be fixed, manual, motorized with spindle, or dynamically with pneumatically relieved direct drive for height compensation during fully interpolated movement. Additionally, a variety of control options are available — with DLL and API for effortless software integration, up to PLC connection. Thanks to the portal design, the double-XYZ wafer positioner can be easily integrated into existing line processes. Repairs, maintenance, and servicing are performed quickly through axis exchange with pre-aligned exchange interfaces, resulting in minimal downtime.

Greater efficiency in the semiconductor industry

Double throughput in a minimal footprint: The double-XYZ wafer positioner from Steinmeyer Mechatronik sets standards in performance, space-saving design, and handling, enabling significant efficiency gains for the semiconductor industry.