-
- Science
Plasma deposition system at the Center for Nanophotonics is being renovated with 490,000 euros
DFG funds sustainable modernization of the central research facility at TU Berlin
A central research facility of the Technical University of Berlin is being prepared for the coming decades: With support from the German Research Foundation (DFG) and the State of Berlin, the plasma etching system in the cleanroom of the Center for Nanophotonics is being extensively renovated with a…








