6-Axis Manipulator for Semiconductor Inspection

The 6-axis manipulator from Steinmeyer Mechatronik performs highly precise alignment processes in semiconductor inspection. (Image: Steinmeyer Mechatronik GmbH)

The 6-Axis Manipulator from Steinmeyer Mechatronik combines a cross table with a tripod, achieving maximum precision, stiffness, and compactness. An ideal solution for high-precision inspection systems in the semiconductor industry.

Before measurement or processing, wafers and optics must be aligned micrometer precisely. This requires compact positioning solutions that reliably and accurately realize small travel ranges of a few millimeters or degrees. Steinmeyer Mechatronik offers the right solution with the 6-Axis Manipulator. The Dresden-based company is an established supplier of positioning systems in semiconductor inspection and knows the application-specific requirements precisely. The 6-Axis Manipulator is characterized by the highest precision in the sub-micrometer range and a compact design, making it ideal for high-precision alignment processes.

Highly precise 6-Axis Manipulator for Semiconductor Inspection

The 6-Axis Manipulator consists of a horizontal cross table and a tripod for vertical lift and two tilts, combining the strengths of Cartesian and parallel kinematic structures in one system. The Cartesian XY adjustment provides travel ranges of ±15 mm, and the vertical axis of the tripod is designed for lifts of ±10 mm. The rotational axes Rx and Ry allow tilting of ±2°, while the rotation around the vertical Rz is 360°. Thanks to a repeatability of ±2.5 µm or ±0.005°, very precise alignment results can be achieved — even under high loads of up to 15 kg.

Aligning Wafers and Optics

The manipulator features a central through-light opening of 250 mm and can be used for aligning wafers and optics up to 300 mm / 12". Custom versions for larger 450 mm / 18" wafers and optics are available. The 6-Axis Manipulator is used, among other applications, for testing and bonding on wafers and PCBs, as well as for combinations of optical inspection and processing, such as chip-on-board bonding (measuring microscope and laser soldering). Cleanroom versions are available. Connectivity is via EtherCAT, CAN, Ethernet, or Profibus. Depending on the machine environment, motion controllers for Beckhoff, ACI, or Siemens can be integrated. Prepared software interfaces and libraries for all common industrial controllers and high-level languages (API) are available.

Specialist for Customized Mechatronic Positioning Solutions

For more than 150 years, Steinmeyer Mechatronik has been developing and manufacturing innovative positioning solutions perfectly tailored to each application. All departments — development, mechanics, electronics, software, manufacturing, assembly, measurement laboratories, testing center — work interconnected under one roof at the Dresden site. This enables optimal utilization of synergies and quick, straightforward implementation of specific customer requirements.