Ultrathin aligner for precise adjustment with high throughput

The 3D Mask-Aligner MP700-3 is an innovative, industrial-grade, and scalable solution for compact and precise alignment with high throughput. (Image: Steinmeyer Group)

With the 3D Mask-Aligner MP700-3, Steinmeyer Mechatronik offers an innovative, industrial-grade, and scalable positioning solution for the electronics and semiconductor industries. The parallel kinematic system with air bearings and direct drives operates completely particle- and maintenance-free, enabling the highest precision in ultra-flat design and high dynamics.

The MP700-3 is an ultra-flat aligner with an aperture of 730 x 730 mm for highly accurate alignment and positioning of large substrates, masks, frames, screens, and printing plates in a particle-free environment. The multi-axis system features a movable frame supported by three identical modules and achieves two translational movements of ± 5 mm in the plane and a rotation around the vertical axis of ± 3°. The overall movement results from the individual movements of the three drive units according to the parallel kinematic principle. This ensures high repeat accuracy of up to 0.4 µm or ± 0.0002° under loads up to 28 kg, as well as an ultra-flat design with dimensions of 990 x 1,090 mm.

Innovative Construction

Each drive module integrates porous graphite air bearings, a highly dynamic electronically commutated linear motor, and an inductive feedback system based on a measurement body. The air bearings enable extreme stiffness. Once the measurement head is positioned, the air is released from the bearings, and the system is fixed by its internal pre-tensioning. Linear drives and step sizes in the sub-micrometer range ensure maximum throughput and stable processes within a compact space. All cables and hoses for data communication, air, and power supply are permanently installed. The system operates 100% particle-free, is completely maintenance-free, and offers an infinite lifespan.

Wide Range of Options for Customization

As a specialist for customer-specific solutions, Steinmeyer Mechatronik offers a broad variety of options. Whether aperture, sample holder, or extension with Z-axis, whether integrated motion controller or PLC connection, whether standalone device or flexible inline concept: the possibilities for application-specific customization are virtually limitless. Of course, a custom setup with frame, vibration isolation, and enclosure, as well as design for cleanroom ISO 14644-1 Class 1, are also possible. All parallel kinematic systems are delivered fully assembled, equipped with the necessary control, and tested according to customer-specific criteria.

Wide Range of Applications in the Electronics Industry

With the 3D Mask-Aligner MP700-3, Steinmeyer Mechatronik pushes technological boundaries and offers the electronics industry an innovative, industrial-grade, and scalable solution for compact and precise alignment with high throughput. Application possibilities include printed circuit board manufacturing, UV printers, semiconductor inspection, semiconductor alignment, sample positioning, analysis, transmission and transmitted light measurements, transfer measurements, and electronics manufacturing.