Save costs under perfect conditions

Complete metal-free cleanrooms

Laboratory overview - The furniture is also metal-free

Monitoring

Perfect conditions for modern semiconductor technologies

Perfect conditions for modern semiconductor technologies

Desk workspace

The custom equipment manufacturer MK Test Systems produces both metal-free wet and dry workbenches.

Working under perfect conditions while saving significant costs is possible with the newly developed metal-free wet-dry workbench, which the special equipment manufacturer MK Test Systems and Laboratory Supplies e.K. is bringing to market.

The wet-dry workbench designed as a mini-environment creates the highest level of cleanliness at the point of action. This is particularly interesting for processes in semiconductor technology, where the need for the highest purity levels is only necessary directly at the workstation (Cleanroom Class ISO 3).

Reduction of energy consumption by up to 50 percent in air management possible

Like all other metal-free systems from MK Test Systems, the wet-dry workbench features a ventilation system developed by MK Test Systems itself, which leads to a significant reduction in energy consumption. The developers assume that, through intelligent air management, energy savings of up to 50 percent are possible in climate control. Particularly interesting is that retrofitting into existing cleanrooms with a special ventilation concept, even in critical room ventilation conditions, is easily achievable, thus enabling the energy-saving effect here as well. Of course, the metal-free workbenches also offer maximum corrosion and product protection.

Self-developed hardware and software enable easy integration into existing systems

A Quick Dump Rinse (QDR) basin for cleaning semiconductor wafers can be integrated into the wet-dry workbench. The QDR basin is modular and consists of process basin and collection basin. In the process basin, the cleaning of semiconductor wafers or wafer carriers takes place. The cleaning is performed via a spray system that fills the basin with high-purity water, stopping the etching process on the semiconductor wafers. To remove contaminants from the wafers, they are flushed out by the suction created when opening the valve.

Technical data for the QDR basin

- Material: state-of-the-art plastic – Polypropylene (PP)
- Capacity: 22.5 liters
- Overflow weir: 360°
- Number of spray nozzles: 8
- Filling time: approx. 120 seconds
- Draining time: approx. 10 seconds
- Wafer carrier size: up to 8"
- Rinsing medium: DI water
- QDR drain valve: 2.5 – 5.6 kg/cm²

Like all hardware from MK Test Systems, the software is also an in-house development by the special equipment manufacturer. This has the major advantage that integration into existing, higher-level digital systems can be implemented much more easily. Direct GLT integration is possible, as well as connection to LIMS or MES systems via an OPC UA interface (Industry 4.0). This makes it possible to create an optimal environment that integrates all processes and process equipment into the mini-environments.

Technical equipment of the wet-dry workbench

- Automated front slider with individual adjustment
- Light grid
- VSR connections for supply and exhaust air
- Lighting (including yellow light)
- Work chamber with pressure monitoring for process safety
- Temperature monitoring of work chamber and exhaust air
- Signal LED and buzzer
- PLC control
- Supply air filter (Class H14)

Optional equipment for the wet-dry workbench

- Integrated pass-through to neighboring workbench
- Connections for Thermal Dissolution Unit (TDU)
- Media supply upon customer request (individual testing)
- Control panels for media (manual, foot, display)
- Ultrasonic basin
- Exhaust air scrubber and exhaust air sprinkling
- Underfloor rinsing
- Partition wall
- Connection options for temperature monitoring
- Remote maintenance upon customer request
- Ionizer
- Quick Dump Rinse basin
- Process basin
- Rinse basin
- Spin Coater

The special equipment manufacturer MK Test Systems and Laboratory Supplies e.K., founded in 1988, develops and builds metal-free cleanroom systems and cleanrooms. Additionally, they offer glove testing devices that enable users to efficiently and automatically test gloves. Due to long-standing business relationships with leading pharmaceutical companies and laboratories worldwide, MK Test Systems' products meet the highest quality standards. MK Test Systems is an ISO 9001:2015 certified industrial company.