Micro-optical systems for intelligent control

The photolithography process must be carried out in a completely dust-free environment. In addition to state-of-the-art cleanroom technology, special clothing and furniture also ensure a contamination-free process. Employees enter and leave the cleanroom via an airlock, which is also used as a changing room.

In the 100 sqm cleanroom CleanCell© of ISO Class 6, wafers for micro-optical components are developed and tested. Windows and lighting are equipped with yellow light filters, as the sensitive coatings must not be exposed to UV light.

The intelligent control of electronic devices and data transfers is advancing at a breathtaking pace. The development of ever smaller and more precise sensors creates possibilities that seemed utopian just a few years ago. These development steps were made possible by the use of precise cleanroom technology, which protects sensitive products from even the tiniest contaminants.

The company Heptagon Advanced Micro Optics is one of the most innovative firms worldwide, with revolutionary developments in micro-optical systems. For example, light and motion sensors developed by Heptagon are used for intelligent control in smartphones. The international company has established its research and development center at its Zurich location. There, Heptagon has now installed an additional 100 sqm of cleanroom space with the latest technology for cutting-edge wafer processing.

The high-precision wafer technology used can be significantly disturbed by even the smallest contaminants during processing. Therefore, the production of these sensitive components takes place exclusively in cleanrooms equipped with specialized air guidance and filtration systems that remove even the tiniest airborne particles from the surrounding air. The development process occurs in a cleanroom system adapted to the requirements of photolithography, called CleanCell©, which maintains a cleanroom air quality of ISO class 6. The integrated climate control ensures constant temperatures and humidity levels necessary for the process.

The technically demanding facility was commissioned from SCHILLING ENGINEERING GmbH, a company specialized in cleanroom technology.

A fully integrated recirculation and exhaust air system within the cleanroom walls ensures precise cleanroom ventilation based on the turbulent mixing ventilation principle. This innovative recirculation technology, which is highly energy-efficient, along with the use of ultra-high-performance filters, were decisive reasons for Heptagon to choose the South German company.

The Swiss researchers are also satisfied with the installation of the innovative cleanroom control system CR Control®. It connects sensors that measure pressure, humidity, and temperature to filter modules, climate cabinets, door and lighting functions, and other components. All essential functions are monitored and recorded, and they are also clearly displayed on a central touchscreen, from which they can be individually operated and regulated.

The cleanroom system was specifically adapted in close collaboration to meet the needs of the research and development site. The cleanroom was realized, including planning, construction, and qualification, within just 3 months and handed over ready for operation.