Innovative 5-Axis Aligner for the Semiconductor Industry

5DOF Miniature XYZ-Phi-Delta Positioning System for active alignment and mounting of optics. (Copyright: Steinmeyer Mechatronik)

With the 5DOF Miniature XYZ-Phi-Delta Positioning System, Steinmeyer Mechatronik offers an innovative solution for highly precise alignment processes. The combination of a tripod and XY cross table guarantees maximum precision, robustness, and reliability, while also impressing with its compact design and high user-friendliness. An ideal solution for optical and active alignment.

The 5DOF Miniature XYZ-Phi-Delta Positioning System from Dresden positioning specialist Steinmeyer Mechatronik consists of a tripod (MP200-3) and an XY cross table (KDT235) – both with through-hole opening – combining the advantages of parallel kinematic and stacked systems in one product. It is highly precise throughout the entire travel range, requires little space, is easy to control, and, thanks to its robust construction, can perform millions of cycles under industrial conditions. The 5-axis aligner is a prime example of the high innovation capability and solution competence of the Steinmeyer Group and has proven to be an user-friendly, cost-effective solution in numerous alignment applications in the semiconductor industry.

Highest Precision over Large Travel Ranges

The positioning system measures 235 mm in length, 235 mm in width, and 170 mm in height. It achieves travel ranges in XY of 100 mm, a lift of 4 mm, and tilts in Phi and Delta of 4°, and features absolutely consistent repeatability across all degrees of freedom. The three vertically acting precision axes of the tripod are connected via solid joints to the movable load plate. This allows the load plate to tilt in two axes and also be adjusted in height. A hardened and ground lead screw from Feinmess Suhl with a spindle diameter of 5 mm and a thread pitch of 0.5 mm enables fine positioning movements. Feinmess Suhl's lead screws are specialists for small, highly precise positioning movements and are therefore ideal for positioning in tight spaces. They also operate reliably over long periods in vacuum and cleanroom environments with special lubrication.

Cartesian Base Frame

The XY movement is provided by the compact and robust through-hole scan table KDT235, on which the tripod is mounted. Highly precise ball screw spindles and an adjustable orthogonality ensure highly accurate positioning and process accuracy. The precision ball screw spindles from August Steinmeyer are equipped with a cylindrical nut with 4-point contact and single-turn reversal. The perfect geometric quality and surface finish of the backlash-free preloaded screw drives guarantee ideal synchronization in application and enable the smallest adjustment increments.

Wide Range of Options

Whether for optical and active alignment, high-resolution applications in microscopy, 3D imaging, interferometry, autofocus systems, or semiconductor testing: the 5DOF Miniature XYZ-Phi-Delta Positioning System is versatile in the semiconductor industry and also suitable for non-rotationally symmetric parts. An advantage is also the virtual pivot points, which can be set at any location on the workpiece surface. This allows the pivot point to be placed on the optical functional surface and the inspection object to be viewed from different angles.

A wide range of options allows for maximum customization. Additional equipment includes, among others, rotary tables, sample holders, motion controllers, enclosures, as well as various safety concepts and technologies (emergency stop, door switch, light curtain, laser scanner, STO, SLS). Variants for cleanroom, UV, DUV, non-reflective surfaces, magnetic environments, and vacuum are also feasible.