WISAG takes over the new construction and renovation of the cleanroom covering approximately 4,000 square meters

A cleanroom of ISO class 6 with partial tool equipment. (Source: WISAG Industrie Service Holding GmbH, 2021)

The plenary session above the cleanroom. (Source: WISAG Industrie Service Holding GmbH, 2021)

The sub-distribution for the tool supply in the plenary session. (Source: WISAG Industrie Service Holding GmbH, 2021)

For the Fraunhofer Institute for Photonic Microsystems IPMS (Fraunhofer IPMS), WISAG Industrial Service Group, one of Germany's leading industrial service providers, has taken on the conversion of the existing cleanroom as well as the construction of the new cleanroom ceiling. Additionally, WISAG was entrusted with the installation of a climate-controlled cleanroom for an "E-Beam" chamber within the cleanroom area.

"We were initially commissioned to carry out the renovation, conversion, and new construction of the cleanroom ceiling and technical components on an area of around 4,000 square meters in the existing cleanroom," explains Axel Tesch, Sales Engineer at WISAG Building and Industrial Services in Dresden. In the subsequent order, the industrial service provider was tasked with constructing a climate-controlled cleanroom within the existing cleanroom area. "In our scope of services, we rebuilt approximately 800 square meters of cleanroom ceiling, installed around 500 Filter Fan Units (FFUs), and refurbished about 200 FFUs from stock, fitting them with new filters," summarizes Tesch. Up to twenty WISAG fitters, four commissioning technicians, a project manager, and a designer were on-site at the customer's location for this project. For the installation of the climate-controlled cleanroom, WISAG installed a new raised floor, cleanroom walls with special coating, the ceiling with lighting, FFUs including precision coolers, and the plenum ceiling.

This special cleanroom area was constructed for an E-Beam. "Specific requirements regarding room climate (temperature and humidity), particle count, and vibration decoupling are necessary for the electron beam writer," explains the sales engineer. "To ensure the electron beam writer operates precisely, a cleanroom of ISO Class 3 with a constant temperature of 22°C +/- 0.05 K is required. Our task was to integrate an additional cleanroom area into the already existing and operational cleanroom." For this, the industrial service provider had to carefully introduce all materials with very high logistical effort: the required materials were delivered in foil packaging, cleaned in the material lock, and then brought into the cleanroom.

"The biggest challenge for us was the very tight project schedule," states Tesch. "Including planning the assembly and procuring materials, we had only five months until the completion of the project. During this time, about fifteen other trades were also working on the construction site, which was active six days a week — so meticulous planning was essential. Additionally, the limited options for material delivery made the construction site very logistically demanding for us. Ultimately, however, we were able to complete the project to the full satisfaction of the customer."