Secure processes, minimal TCO: compressed air for the chip industry

The CSG series (right, with integrated rotary dryer i.HOC) reliably and efficiently supplies compressed air for oil-free applications. (Copyright: KAESER KOMPRESSOREN SE)

The CSG series (right, with integrated rotation dryer i.HOC) reliably and efficiently supplies compressed air for oil-free applications. (Copyright: KAESER KOMPRESSOREN SE)

With the warm-regenerating adsorption dryer Calosec, reliable and particularly energy-efficient overall solutions can also be implemented in especially sensitive industries such as the semiconductor industry. (Copyright: KAESER KOMPRESSOREN SE)

SAM 4.0: The Sigma Air Manager 4.0 (SAM 4.0) not only monitors and controls all components of a compressed air station with high efficiency, but also makes them ready for Industry 4.0. (Copyright: KAESER KOMPRESSOREN SE)

Ensuring Process Stability and Sustainably Reducing Total Cost of Ownership (TCO): These are key success factors in the semiconductor industry. Since continuous supply of Class 0 certified compressed air consumes significant amounts of energy, efficient generation immediately translates into noticeable savings in operating costs. This applies to high-end logic manufacturing as well as power semiconductor production.

Sigma Air Manager 4.0: The Optimal Efficiency

Adaptive, efficient, and networked – the machine-wide Sigma Air Manager 4.0 enables particularly efficient operation of compressed air or blower stations. The integrated energy management software ensures that multiple compressors, blowers, dryers, or filters are used in an extremely energy-saving manner. Thanks to the networking of all components of the compressed air station via the secure Kaeser Sigma Network, comprehensive monitoring and energy management as well as predictive maintenance are possible. This minimizes downtime and maximizes production performance.

Series CSG: Significantly Better in Performance and Efficiency

The oil-free screw compressors of Series CSG elevate manufacturing processes to a new level of energy efficiency. Specifically developed for the sensitive requirements of the semiconductor industry, the compressor delivers compressed air of residual oil class 0 according to ISO 8573-1 – ensuring maximum product safety in wafer fabrication, lithography, and pneumatic handling in cleanrooms. Thanks to IE5 synchronous reluctance motors and Sigma Profile, the CSG compressors operate particularly energy-efficiently. The water-cooled option with i.HOC and heat recovery utilizes the waste heat twice – for maximum economic efficiency and high process security.

Warm Regenerating Adsorption Dryer Calosec

The warm regenerating adsorption dryers of Series Calosec impress with a flexible system concept that offers the most economical solution for every requirement. They are the ideal system component for compressed air networks requiring extremely low dew points – standard down to −40 °C, optionally even down to −70 °C (Class 1 according to ISO 8573-1). For maximum operational safety, the intelligent control Calosec Control with comprehensive system monitoring ensures reliable operation. This allows for reliable and highly energy-efficient overall solutions even in particularly sensitive industries such as the semiconductor industry.

Cold Regenerating Adsorption Dryer i.DC

Top quality in the semiconductor industry begins with pure and dry compressed air. The cold regenerating adsorption dryers of Series i.DC ensure stable dew points – standard down to −40 °C, optionally even down to −70 °C (Class 1 according to ISO 8573-1) – reliably protecting sensitive wafer surfaces and high-precision optics from moisture damage. Perfectly matched to Kaeser compressors, the i.DC guarantees high process safety and reliable energy efficiency – for flawless processes in lithography, etching, and pneumatic wafer handling.

Oil-Free Compressed Air for Highest Demands with ACT Activated Carbon Adsorbers

Activated carbon adsorbers of Series ACT are specialists for continuously technically oil-free compressed air. Used after drying and pre-filtration, they reliably meet the strict requirements of Class 1 according to ISO 8573-1 (Residual oil content: ≤ 0.01 mg/m³). This protects highly sensitive wafer surfaces, lithography optics, and cleanroom environments from oil vapor contamination. Generous fill quantities of high-quality activated carbon and permanently low differential pressure reduce operating costs (TCO). The service life of the activated carbon reaches up to 12,000 compressor operating hours, while a standard oil indicator signals potential operational issues early.