Of the outrider in things regenerativ AMC filters

Highly effective filter materials for cost-efficient outside air circulating air and processing air filterings the problem definition: A special challenge in the semiconductor manufacturing with small structure widths are airborne, gaseous substances, which unwanted chemical reactions at the wafer surface and process interfaces can release. This chemical reaction of the acids, the Basen, Organika existing in the processing air and Dopants are admit under the designation AMC (airborne Molecular Contamination). Their control means the investment in AMC filters with leistungsdauer however limited. Here not only highly effective, but also regenerativ, cost-efficient solutions are in demand. The solution: Highly effective AMC filters. M+W Zander Products offers a multiplicity of products and services within the AMC range as one of the prominent offerers.To the reduction of the gaseous Kontaminanten most diverse filtering mediums come to the employment, of activated charcoal materials up to particularly the highly effective faserfoermigen ion exchanger medium developed for the semiconductor industry. Here M+W Zander Products has a position leading world-wide and had singular faserfoermige ion exchanger materials, which can be inserted both for the separation by sour and basic Kontaminanten. All filters know for application in outside and circulating air devices (v-cells design) as well as Tool and process guard filters (flatten design) to be manufactured. Cost-efficient regenerativ filters. Against the HEPA filters for particle separation, used so far in pure areas, AMC filters possess a limited separating capacity and must thus after about 1-3 years of operation by new filters be replaced. This causes both high operating cost and large quantities of waste.The waste reduction was based a crucial argument for the development of regeneratable filter products, on activated charcoal materials as well as on Ionentauschern. On the one hand the operating cost and on the other hand also the quantities of waste is reduced by the repeated use clearly.