Innovative positioning system for Raman spectroscopy up to 12"

The innovative 2X-Y-Ys(Z) positioning system from Steinmeyer is an ideal solution for precise positioning of large and heavy samples in Raman spectroscopy. (Image: Steinmeyer Group)

The 2X-Y-Ys(Z) Positioning System from Steinmeyer Mechatronik is an ideal solution for precise positioning of large and heavy samples in Raman spectroscopy. The cleanroom-compatible microscope stage in gantry design offers an additional loading stroke and scores with a large scanning area, high load capacity, and minimal space requirements. Custom adjustments are possible.

Raman spectroscopy has proven to be a non-destructive, contactless method for analyzing and characterizing materials in industry and research. The quality and reliability of the results depend heavily on the performance of the positioning system used for aligning and moving the samples. Steinmeyer Mechatronik, part of the Steinmeyer Group, specializes in highly precise positioning concepts and is an experienced partner for the semiconductor industry. It develops high-performance, customized solutions that optimally meet application-specific requirements.

2X-Y-Ys (XYZ) Positioning System for Wafer Inspection

Traditional microscope stages typically have scan ranges of up to 150 x 150 mm and are therefore significantly too small for many applications. The solution is the 2X-Y-Ys(Z) positioning system from Steinmeyer. It enables high-resolution movements in XYZ for samples up to 400 x 400 mm, with an additional loading stroke and loads up to 40 kg, making it ideal for Raman measurement of heavy wafer chucks and large wafers up to 12". The excellent stability, uniform motion, and vibration isolation ensure precise focusing of the specific sample area. This allows detailed and accurate information to be obtained at the molecular level.

Designed for Continuous Operation in Semiconductor Production

The gantry structure provides XY movement. With a double-length lift in the upper axis—adding to the 400 mm working stroke in XY—a loading stroke of an additional 400 mm is achieved. Vertical movement and focusing are enabled by an inclined axis combined with simultaneous movement of the Y-axis. The inclined lift is part of the loading stroke. By controlling the Y and Ys axes simultaneously, vertical movement in Z is realized. Thanks to the vertical travel, different sample thicknesses can be measured. The positioning system is designed for low-maintenance operation in 24/7 production environments up to ISO class 4 cleanroom standards (higher on request) and can be easily integrated into existing mechanics and enclosures. The optics can be fixed in place. Drive is provided by ball screw drives and stepper motors. Connection to existing control electronics is via an external controller and DLL or AVI interfaces.

Wide Range of Options for Customer-Specific Customizations

As a specialist in custom solutions, Steinmeyer Mechatronik offers a variety of options for application-specific adaptations. Among others, the following options are available: linear measurement for 0.5 µm repeatability, linear motor for high throughput, tilting axes for aligning the chuck, rotary table for measuring round samples, band sealing, suction, brake, sample holder, enclosure, safety concepts and technology (emergency stop, door switch, light grid, laser scanner, STO, SLS). Of course, custom setups with frames, enclosures, or integration into the fab are also possible.

Innovative Solution for the Semiconductor Industry

Large scan area and high load capacity with minimal space requirements and a high degree of flexibility: The 2X-Y-Ys(Z) positioning system from Steinmeyer sets standards in terms of performance, safety, and reliability. It is an innovative solution for analyzing organic compounds on ultra-pure surfaces—whether in semiconductor production and development (chucks, wafers, chips), surface analysis (lithography equipment, wafer steppers, dicing), display manufacturing, drug development, assay development, or active ingredient optimization.