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Buchta Pfennig Reinigungstechnik GmbH Hydroflex MT-Messtechnik



(Copyright: Polytec GmbH)
  • Products, devices, systems, plants for applications

Optical wafer-level characterization of MEMS dynamics with automatic wafer map processing, recipe control, and cleanroom integration into fab-controlled workflows.

Fully automated MEMS vibration analysis in cleanroom: Polytec Micro System Analyzer now with ISO-3 certification and script automation

With the Micro System Analyzers (MSA-600, MSA-650 IRIS, MSA-100-3D), Polytec has been addressing contactless characterization of MEMS dynamics and topography for years – from individual dies to wafer-level testing on probe stations. The current expansion combines this optical measurement technolog…

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