High Purity at the Highest Level

The new High Purity System was delivered to Tyrol in several individual components. Final assembly took place at the new Swacrit plant in Nassereith, accompanied by the cleaning experts from Ried. (Photo: LPW/Swacrit Systems)

The automation, designed and manufactured by LPW, consists of full stainless steel and is equipped with, among other things, FFU transfer tracks. (Photo: LPW/Swacrit Systems)

The ultra-fine cleaning system from LPW is connected to two cleanrooms (ISO 6 and 8) via automation. (Photo: LPW/Swacrit Systems)

Swacrit Systems GmbH specializes in the production of complex mechatronic integrated assemblies as well as high-precision components and is an innovation partner for high-tech customers from sectors including the semiconductor/analytics industry and medical technology. For the third operational site in Nassereith/Tyrol, the rapidly growing Austrian company required an ultra-fine cleaning solution connected to two cleanrooms. This was designed by LPW Reinigungssysteme GmbH and recently delivered. The system offers high purity at the highest level and represents one of the development highlights of the Ried-based cleaning experts.

Already in 2015, LPW delivered one of the first standard systems with integrated CNp process (cyclic nucleation) to the Wildermieming facility. Based on positive experiences with this system in cleaning stainless steel components from high vacuum technology and further discussions during planning for the new plant at the end of 2023, the Tyroleans once again commissioned the Swabians.

Requirements:

- In addition to the classic parameters of high vacuum technology regarding residual organics, the focus was clearly on particle cleanliness in the size classes < 10, 5, and 1 μm for complex and machined parts made from various non-corrosive materials
- Batch size 800 x 800 x 480 mm
- Automation linked to an autonomous transport system for material supply and connected to two cleanrooms of ISO classes 6 and 8.

Within 12 months, the ultra-fine cleaning system was developed based on the PowerJet Ultra series, consisting of proven modules tested over years and meeting the highest standards of high purity technology. The system was only adapted in its dimensions to meet Swacrit Systems' requirements.

The PowerJet 800 T6 Triple Ultra was delivered, featuring 3 ultra-treatment chambers:

- Chamber 1 (Cleaning 1, Rinsing 1)
- Chamber 2 (Cleaning 2, Rinsing 2 and 3, Drying 1)
- Chamber 3 (Fine rinsing, drying)

All chambers are equipped with the latest generation of the CNp process. This includes features such as automatic temperature compensation. The process runs closely along the vapor pressure curve. Pressure fluctuations and thus material damage are excluded. The CNp effect of the asymmetric volume flow has been further refined, as it shows the best results in ultra-fine cleaning. Ultrasound is additionally integrated into chambers 1 and 2. The media preparation for the cleaning and rinsing circuits is carried out with high filtration rates in the forward and return lines, as well as in the bypass with filter fineness down to the sub-micron range. The IR/hot air vacuum systems are designed to ensure efficient drying according to cleanliness requirements without contributing to quality-degrading cross-contamination. Final drying can also be performed in a nitrogen atmosphere. The rinse bath preparation is managed via an integrated VE circuit, with the final rinse circuit supplied by the LPW ultra-pure water module. This module, with a media reserve of approximately 1,300 liters for preheated water (up to a maximum of 65°C), also supplies the pure water for the entire system. The automation, designed and manufactured by LPW, consists of stainless steel and is equipped with FFU transfer lines, cleanroom doors, and transfer within the cleanroom.

LPW CEO Gerhard Koblenzer: “This ultra-fine cleaning system currently represents one of our development highlights. Among other things, due to the process control software, the special monitoring approach combined with a complex batch protocol, and the high-quality media preparation, especially in the rinsing tanks. Additionally, the dimension and design of the pure water supply unit are new. It is significantly more powerful and can not only feed pure water but also ensure a pure water loop in the final rinse. Furthermore, this concept integrates process monitoring with extensive sensor equipment for particle, TOC, conductivity, and pH measurement in the relevant subprocesses, allowing the respective cleaning and rinsing processes to be monitored and centrally evaluated during various phases.”

Jürgen Wildauer, Production Manager at Swacrit Systems GmbH, explains the decision details: “With our new operational site in Nassereith, we are able to meet the highest customer requirements regarding cleanliness. The cleaning system for high purity components plays a central role in our production concept. The cleaning process is directly connected to our ISO 6 cleanroom, which leaves the option open to upgrade to ISO 5 in the future. The cleaning must be performed at a class one level above the cleanroom classification according to our specifications. Particle cleanliness and the removal of filmic contaminants are of enormous importance to us. Additionally, our goal is to ensure maximum automation of our production equipment. After a comprehensive market screening, it became clear that only very few cleaning system manufacturers can meet our entire requirements. The decisive reasons for choosing LPW were both their impressive list of references in the semiconductor, analytics, and medical technology sectors, and the ability to combine various cleaning technologies within one system. Especially noteworthy is the patented CNp function, which makes a crucial difference for us. The professional approach from planning to project implementation confirmed our decision to select an LPW system. Finally, it should be mentioned that LPW not only manufactures systems but also develops its own processes in-house to work together with customers to meet the highest standards. With this new system, we are able to fulfill the ever-increasing customer demands in the high purity sector.”