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- Cleaning | procedures, devices, agents, media (Wipers, Swaps,...)
High purity cleaning at Grade 1 and Grade 2 level
Pilot plant test confirms: BvL cleaning system fulfills high purity requirements of the semiconductor industry
The cleaning performance of the Atlantic immersion cleaning system was tested in the BvL Oberflächentechnik GmbH technical center with regard to the requirements of the semiconductor supply industry. The aim was to achieve particulate and molecular cleaning at least at the Grade 2 level typical for…