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Vaisala Piepenbrock ClearClean MT-Messtechnik



The new SensoTech sensor enables continuous inline monitoring of chemical concentrations in semiconductor wet processes. (Image: SensoTech GmbH) The controller visualizes the inline-measured concentrations of, for example TMAH and H₂O₂ as well as the process temperature, in real time. (Image: SensoTech GmbH) The controller visualizes the inline-measured concentrations of, for example TMAH and H₂O₂ as well as the process temperature, in real time. (Image: SensoTech GmbH)
  • Electronics (wafers, semiconductors, microchips,...)

Measure concentrations inline in processes such as SC1, SC2 and BOE

New ultrasonic sensor from SensoTech for semiconductor wet processes

New sensor technology measures critical chemicals directly in the running process and helps semiconductor manufacturers detect process deviations earlier, reduce (lab) effort and run wet processes more stably.

In semiconductor manufacturing, reliable, controlled wet processes determine yield, quality…

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HJM PMS Pfennig Reinigungstechnik GmbH C-Tec