SMC modifies high-vacuum angle valves of the XL series

Technical details overview

The high-vacuum angle valves of the XL series: now also with heat-resistant signal indicator for high-temperature design, optionally with solenoid valve and replaceable bellows. (Photo: SMC Deutschland GmbH)

Like all high-vacuum corner valves of the XL series from SMC, the new models are also equipped with an aluminum housing. This offers multiple benefits for users: the low weight, high durability, and resistance to aggressive media such as fluorine gas are important advantages. Additionally, thanks to the excellent thermal conductivity of aluminum, a largely homogeneous temperature distribution is achieved within the valve body. This largely prevents deposits of process gases inside the valve. When the corner valves are used under pure production conditions, aluminum offers another advantage over steel: the valve housing contains no heavy metals such as nickel or chromium, resulting in only minimal contamination of the media in contact. Since aluminum hardly outgases, it is possible to work with smaller vacuum pumps or shorten evacuation times when using the new XL series corner valves.

Due to these specific advantages, the corner valves of the XL series can, in the opinion of Tobias Hartherz, Product Management at SMC Germany, especially excel in the pre-processes of the semiconductor industry. Specifically, sputtering and CVD systems, as well as equipment for etching and plasma etching, can benefit. But he also sees many application possibilities in the food industry and medical technology: “In vacuum drying cabinets, vacuum freeze-drying systems, oxygen reduction systems, or vacuum filter systems, the XL series corner valves can fully demonstrate their strengths.”

Two sealing options available

Thanks to the wide range of flange sizes from 16 to 80 mm nominal diameter, the XL series corner valves can be integrated flexibly. As a sealing variant, users can choose between two designs: in addition to the bellows seal, there is also an option with an O-ring seal for shorter cycle times.

Those opting for the corner valves with bellows seal can easily perform necessary replacements: a special replacement set contains only the bellows assembly. The pneumatic actuator does not necessarily need to be replaced. Tests at SMC have shown that the newly designed form can achieve a lifespan of up to 2 million cycles if the recommended evacuation direction is followed. A corner valve with an 80 mm flange size was tested.

With heating element, usable up to 150 °C

Optionally, the XL series models can be ordered with a heating element and a heat-resistant signal indicator that features a two-color display. In this version, the corner valves are suitable for operating temperatures up to 150 °C.