Pfeiffer Vacuum+Fab Solutions presents the new turbopump ATH 4506 M

With a suction capacity of 4,500 l/s for nitrogen, the new turbopump is suitable for processes in semiconductor manufacturing, surface coating, and other applications requiring a high gas throughput, such as evacuating large vacuum chambers for space simulation.

Plug & Play operation with integrated controller

The ATH 4506 M features an integrated controller that eliminates the need for separate external control units, simplifies installation, and reduces the space required for system setup. In just nine minutes, the vacuum pump reaches its full speed of 23,500 RPM, allowing manufacturing processes to start quickly. An energy-saving mode reduces power consumption during inactivity, contributing to energy-efficient operation.

Temperature management tailored to process requirements

Depending on process conditions, different operating temperatures are required. For this reason, the ATH 4506 M is available in two versions:

- An unheated variant for clean, corrosion-free applications that do not require additional heating — for example, in surface coating.
- A version with a temperature management system (TMS) up to 90°C for semiconductor production and other corrosive processes where moderate heating prevents condensation and particle formation.

By adjusting the temperature of the vacuum pump to the process, the ATH 4506 M minimizes condensation and particle buildup inside the pump, reduces wear on internal components, and prevents unplanned downtime. This leads to higher reliability, consistent product quality, and lower overall operating costs for the user.

Condition monitoring and digital integration

The ATH 4506 M is equipped with internal sensors to monitor temperature, flushing conditions, rotational speed, and axial movement. Based on these measurements, operators can monitor the condition of the vacuum pump in real time and detect irregularities early. This helps prevent unplanned downtime and facilitates predictive maintenance. As the vacuum pump is IoT-capable, it can be connected to digital monitoring systems and integrated into automated production environments.

With an IP54 protection rating, the vacuum pump is protected against dust and splashing water. This increases its durability in demanding industrial environments and extends its service life.