Maximum performance in high vacuum

The new high-vacuum valve of the XLJ series increases the performance of numerous vacuum systems thanks to its lead-free aluminum housing and integrated vent valve. (Photo: SMC Deutschland GmbH)

To enable vacuum systems in the automotive industry, medical technology, or semiconductor manufacturing to achieve maximum performance, all components must deliver optimal performance. The new high-vacuum angle valve of the XLJ series from SMC meets these requirements and enhances safety and productivity – thanks to a robust aluminum housing and features such as a vent valve: This reduces potential oil problems and downtime to a minimum, ensuring more efficient operation of the entire vacuum system.

As expected from all its high-vacuum valves, SMC also relies on the combination of a durable aluminum housing and performance-enhancing features for the XLJ series. This benefits vacuum systems in many industries, such as semiconductor manufacturing, coating, or freeze-drying systems. In these and other areas, it helps create a molecule-free space or a high vacuum in vacuum chambers. The minimal outgassing of the aluminum housing shortens the time required to reach this state (evacuation) or allows the use of a vacuum pump with lower capacity. This conserves valuable time and material resources.

Robust outside, productive inside

Furthermore, an attached vent valve increases the efficiency of the respective vacuum system: If the valve remains closed during evacuation or normal operation, it opens when the pump is turned off or in case of a power failure, bringing the pressure inside the pump back to atmospheric level. This prevents hydraulic oil from flowing into the vacuum chamber. Positive effects include reduced downtime and thus more efficient system operation, making welding machines more productive and electron microscopes more powerful.

Thanks to electrical control, the use of the high-vacuum angle valve offers improved installation flexibility, while the already attached vent valve eliminates mounting effort. Additionally, users of the XLJ series benefit from further advantages of the aluminum housing: including lower weight, high corrosion resistance against aggressive media such as fluorine gas, and excellent thermal conductivity. The latter ensures a homogeneous temperature distribution inside the valve, significantly reducing the deposition of process gases.

Moreover, the valve housing is completely free of heavy metals such as nickel or chromium. This minimizes contamination of contacting media and optimizes, for example, the quality of end products that could be contaminated by heavy metals (e.g., semiconductor components).

High-vacuum systems benefit in many industries

The numerous advantages of the new high-vacuum angle valve with venting function open up application possibilities across various industries. For example, the XLJ series is used in pre-processes in the semiconductor industry, such as etching, plasma etching, sputtering, or CVD systems.

It also demonstrates its strengths in the food industry, increasing productivity – for example, in freeze-drying systems – and provides more precise insights in electron microscopes used in medical technology. Additionally, it is employed in oxygen reduction systems, vacuum filtration systems, or vacuum-insulated equipment.

In the automotive industry, it scores points in production, such as in aluminum coating systems for headlights, in electron beam welding machines, or leak detectors/testing devices. The XLJ series thus helps high-vacuum systems in numerous industries achieve greater performance – and optimizes their process safety and productivity.