Highest purity over long distances with a novel cleanroom energy management solution from igus

The C6 energy chain in combination with the new e-spin upper guide wheel enables reliable energy and data supply with minimal particle emission – and this over travel distances of up to 30 meters. (Source: igus SE & Co. KG)

Whether in microelectronics, semiconductor or battery manufacturing, it's all about particle-free environments and maximum process safety. As automation increases and plants grow larger, the routes for material transport also become longer. A central challenge is to ensure a reliable supply of energy and data with minimal particle emission. Busbars do not transmit data, and energy chains usually require complex suction systems for microparticles. With the C6 energy chain, certified by Fraunhofer IPA according to ISO Class 1, combined with the new e-spin upper guide wheel, igus now offers a solution. The system enables a compact and durable energy supply in cleanrooms – even over travel distances of up to 30 meters.

In modern semiconductor factories, silicon wafers undergo numerous process steps – from lithography to etching to metallization. Due to strict cleanliness and particle-free requirements, manual transport within the cleanroom is not practical. Instead, increasingly automated systems take over the safe and efficient transport of wafer cassettes over long distances. For example, via Overhead Hoist Transport (OHT), a rail system that moves the cassettes under the ceiling. While this saves cleanroom space, it presents a challenge for designers: supplying power and data to the OHT. “Busbars do not transmit data and are maintenance-intensive. Energy chains usually require a complex suction device for particles. The need for a cleanroom-compatible, durable, and cost-effective alternative is accordingly high,” explains Kira Weller, product manager for e-chains and cleanroom expert at igus.

Rolling instead of sliding with the new e-spin guide system

To solve this dilemma, igus developed a special guide system called e-spin for the C6 cleanroom energy chain. It consists of guide wheels, which, like all igus energy chains, are made from tribologically optimized high-performance plastic, designed to reduce friction and wear. The wheels are positioned between the upper and lower run of the energy chain. The chain parts roll on each other instead of sliding – and this without additional particle emission. “Thanks to the e-spin system, the energy chains can be used in production within a cleanroom without an extraction unit,” says Kira Weller. This reduces complexity and costs in the design of transport system energy supply. The energy chain system can be configured quickly via the e-chain experts on the igus website. At the same time, the system, consisting of the C6 energy chain and guide wheels made from high-performance plastic, is abrasion-resistant, low-maintenance, and particularly durable. Laboratory tests in collaboration with Fraunhofer IPA confirm: the system reaches the highest cleanroom class ISO 1 at a speed of 0.5 m/s. igus aims to push the technical limits further in the future regarding higher speeds and longer travel distances.