GEMÜ C60 with extended control pressure ranges

With extended control pressure ranges, GEMÜ is simplifying the integration of the pneumatically operated 2/2-way diaphragm valve GEMÜ C60 into systems used in the semiconductor industry. The required control pressures depend on the actuator size and control function. This allows the pressure supply to be tailored specifically to the particular system design. The GEMÜ C60 has been specially developed for high-purity applications and is used in particular at the supply and distribution level of modern semiconductor factories.

Control pressure ranges for different control functions

For the NC (Normally Closed) version, the control pressure is between 4 and 7 bar, 4.5 and 7 bar or 5 and 7 bar, depending on the actuator size. For the NO (Normally Open) version, the maximum control pressure for actuator sizes 1 to 3 is 5 bar. For actuator size 4, the maximum control pressure is 4.5 bar. In addition, GEMÜ has optimized the transparent cap’s locking device, thereby improving its secure fit within the actuator housing.