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Optical wafer-level characterization of MEMS dynamics with automatic wafer map processing, recipe control, and cleanroom integration into fab-controlled workflows.
Fully automated MEMS vibration analysis in cleanroom: Polytec Micro System Analyzer now with ISO-3 certification and script automation
With the Micro System Analyzers (MSA-600, MSA-650 IRIS, MSA-100-3D), Polytec has been addressing contactless characterization of MEMS dynamics and topography for years – from individual dies to wafer-level testing on probe stations. The current expansion combines this optical measurement technolog…
