Cleanroom Rotomat® optimized wafer production

The calotte carriers for the wafers are stored in the cleanroom Rotomat® CleanStore until they are used in the vapor deposition system.

Through the circulation rack from Hänel, the required storage floor space in the cleanroom could be maintained, despite a tripling of storage capacity from 12 to 36 wafer cassettes.

Automated picking systems are becoming increasingly indispensable. At the Lenzburg site, ABB Switzerland AG optimizes its wafer production even in the cleanroom with an automated circulating shelf. On a small footprint, a rotary storage system specially developed by Hänel for cleanrooms efficiently consolidates the storage space.

The range of ABB products in energy and automation technology is immense. Among other things, the company develops and manufactures products from high-voltage switchgear to microscopic high-performance semiconductors. The innovative technologies and high reliability of the products secure ABB's leading position in the global market.

At the Lenzburg site, ABB Switzerland AG develops, produces, and markets power grid systems, semiconductors, and high-performance semiconductors. The primary task in the cleanroom is to prevent particle adhesion in all operating states.

ABB Process Engineer Eustachio Faggiano explains: "The automated circulating storage developed by Hänel specifically for the cleanroom has no burrs or gaps. The surfaces are smooth and easy to clean with isopropanol solutions." Faggiano is the responsible manager for the Hänel industrial lift Rotomat® CleanStore installed in the cleanroom, which meets the cleanroom class 5 according to DIN EN ISO 14644-1 with filter class HEPA H14. Even the logging of measurement data is optionally possible with this Rotomat® industrial lift via data loggers. Hänel developed this high-tech storage specifically for cleanrooms as a self-contained system. The double-walled design allows the air in the circulating storage to be cleaned directly through a filter. This prevents particles from entering the cleanroom. Faggiano adds: "After loading the calotte carriers with wafers, they are stored in the Rotomat® CleanStore until they are used in the vapor deposition system. In the meantime, the wafers must not come into contact with particles."

Furthermore, the empty calottes must also be kept free of dust particles. Therefore, they are also stored in the circulating storage. This way, as many calotte carriers as possible are compactly and protectedly stored in the new high-tech storage on a small footprint.

Conclusion

The Hänel CleanStore principle is based on sophisticated double-walled technology combined with filter and fan systems. The space-saving Rotomat® technology forms an effective storage concept and has been further developed by Hänel for cleanrooms.

The Rotomat® CleanStore is used flexibly and economically in both the electronics and semiconductor industries as well as in medical technology. All parts are protected and stored according to defined cleanroom guidelines. Operating the Hänel Rotomat® industrial lift is simple. Thanks to its compact design, no structural modifications are necessary. Additionally, the short storage and access times effectively save costs for inventory management.

At ABB Lenzburg, the wafer calottes were previously stored in a conventional shelf rack. The compact and automated picking system CleanStore, specially developed by Hänel for the cleanroom, maintained the storage capacity for wafers at a tripled level—from 12 to 36 wafer calotte carriers, while still occupying the same footprint.