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Imec Shows Path to Line Resistance Halving using Semi-Damascene with High-Aspect-Ratio Processing
At the 2022 IEEE International Interconnect Technology Conference (IITC 2022), imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, presented options to reduce the metal line resistance at tight metal pitches, mitigating the resistance/capacitance (RC) incre…