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- Science
An interview with Dr. Andreas Thies from the FMD Institute Leibniz FBH
Ion implantation: A process that has revolutionized semiconductor manufacturing
The development of ion implantation in the 1960s was one of the fundamental prerequisites for the production of highly integrated circuits as we know them today. The process is used to introduce foreign atoms into a semiconductor and thus, for example, change its conductivity (doping). At the Ferdin…








