Zeiss: Large order for semiconductor equipment

The Semiconductor Manufacturing Technology division of Zeiss was able to record a major order for semiconductor equipment in February. A customer from the USA ordered a total of ten devices for semiconductor manufacturing from the Semiconductor Metrology Systems (SMS) division, headquartered in Jena. The order volume is in the double-digit million range and demonstrates the strong reputation of the SMS division among its customers.

The equipment is used in a specialized segment of semiconductor manufacturing: for optimizing lithographic photomasks. With the help of Zeiss devices, photomasks can be measured with high precision, errors analyzed, and repaired. "Zeiss has been a close partner of major chip manufacturers for many years. With this recent large order, an American chip manufacturer has ordered our entire product range," comments Dr. Oliver Kienzle, Chairman of the Management Board of Carl Zeiss SMS GmbH. "This is a great success, showing the trust the customer has in us and the importance Zeiss products now hold in the semiconductor industry." The order volume in the double-digit million range also secures a good foundation for the current and upcoming fiscal year, Kienzle continues.

The devices are developed at three locations of Carl Zeiss SMS GmbH in Jena, Roßdorf (near Darmstadt), and Karmiel (Israel), and are manufactured in Jena and Israel. To prepare for orders of this size, SMS has been renovating and expanding much of the cleanroom capacity in Jena since July of last year. After completing the renovation work in May 2014, the entire production area will meet the high standards of semiconductor manufacturing.