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All publications from Fraunhofer-Institut für Elektronische Nanosysteme ENAS

© Ines Escherich / Fraunhofer ENAS
  • Electronics (wafers, semiconductors, microchips,...)

Fraunhofer ENAS is partner in the new European project “HaloFreeEtch” researching innovative halogen-free etching processes

More sustainability in semiconductor manufacturing

Fraunhofer ENAS is part of the new project “HaloFreeEtch” (“Novel approaches for halogen-free and sustainable etching of silicon and glass”) that started in September 2024. This groundbreaking project, coordinated by the University of Technology Chemnitz, will run for 48 months with a total…

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