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Becker Systec & Solutions GmbH Pfennig Reinigungstechnik GmbH Piepenbrock



CWS Cleanrooms Cleanroom Academy Clothing Exercise
  • Training, Education

What is important when it comes to complying with quality standards for cleanroom products? The experts from the Cleanroom Academy provide the answers.

Key cornerstones for quality-compliant production of cleanroom products

The manufacture of mostly sensitive, highly complex and/or high-quality cleanroom products in a controlled environment that is as clean as possible, requires specific principles to ensure the desired product properties. After all, cleanroom products are subject to the most stringent requirements.

By…

Figure 1 – Top-down SEM images of meanders (left) and forks (right) with a 20 nm pitch after pattern transfer into a TiN hard mask. Figure 2 – TEM image of metallized wires with a 20 nm pitch after a chemical-mechanical polishing (CMP) process.
  • Electronics (wafers, semiconductors, microchips,...)

First electrical tests at 20nm pitch present a next milestone in validating the High NA extreme ultraviolet (EUV) patterning ecosystem

Imec demonstrates electrical yield for 20nm pitch metal lines obtained with High NA EUV single patterning

This week at SPIE Advanced Lithography + Patterning, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, presents the first electrical test (e-test) results obtained on 20nm pitch metal line structures patterned after single-exposure High NA EUV lithography…

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