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HJM Piepenbrock ClearClean MT-Messtechnik



Figure 1 – Top-down SEM images of meanders (left) and forks (right) with a 20 nm pitch after pattern transfer into a TiN hard mask. Figure 2 – TEM image of metallized wires with a 20 nm pitch after a chemical-mechanical polishing (CMP) process.
  • Electronics (wafers, semiconductors, microchips,...)

First electrical tests at 20nm pitch present a next milestone in validating the High NA extreme ultraviolet (EUV) patterning ecosystem

Imec demonstrates electrical yield for 20nm pitch metal lines obtained with High NA EUV single patterning

This week at SPIE Advanced Lithography + Patterning, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, presents the first electrical test (e-test) results obtained on 20nm pitch metal line structures patterned after single-exposure High NA EUV lithography…

  • Trade fair

ChemE Show – Powered by ACHEMA will take place for the first time in Houston, Texas, in 2026

DECHEMA and Gulf Energy Information partner to launch leading US event for process technology

DECHEMA – organizers of the world’s leading trade show for the Process Industries ACHEMA – and Gulf Energy Information are thrilled to announce a groundbreaking partnership to launch the new annual must-attend event for experts, decision-makers and solution providers along the chemical and bio-based…

Cleanroom Production Line (Claudia Feith, Hahn-Schickard) (v. l. n. r.: Dr. Simon Thiele, CTO, Printoptix GmbH; Stefan Wagner, Group Leader Precision Toolmaking + Plastics Technology, Hahn-Schickard; Dr. Karl-Peter Fritz, Institute Director Hahn-Schickard; Dr. Wolfgang Eberhardt, Head of Technology Department, Hahn-Schickard; Dr. Patrick Rapp, State Secretary, Ministry of Economics, Labour and Tourism Baden-Württemberg; Jennifer Mazat, Department 33 Automotive and Manufacturing Industry, Logistics, Ministry of Economics, Labour and Tourism Baden-Württemberg; Prof. Dr. André Zimmermann, Institute Director Hahn-Schickard and IFM of the University of Stuttgart; Dr. Tobias Grözinger, PCB-based AIT, Packaging (CR/APT3), Robert Bosch GmbH; Simon Petillon, Research Associate Laser Technology, Hahn-Schickard)
  • Science

In addition to research topics, the challenges of applied research and collaboration with industry were the main focus of the visit.

Economic State Secretary Dr. Patrick Rapp visits the Hahn-Schickard Institute for Microfabrication Technology in Stuttgart

The institute directors Prof. Dr. André Zimmermann and Dr. Karl-Peter Fritz welcome State Secretary Dr. Patrick Rapp from the Ministry of Economic Affairs, Labour and Tourism Baden-Württemberg. Dr. Rapp met with scientific staff and industry partners of the institute for an exchange on current chall…

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PMS Pfennig Reinigungstechnik GmbH C-Tec Vaisala