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Buchta Pfennig Reinigungstechnik GmbH MT-Messtechnik HJM



Cobots are making their way into the cleanrooms of the electronics industry. In semiconductor manufacturing, they excel in reliability and meet the highest quality standards. The sensitive silicon wafers can together be worth the value of a mid-range car per cassette. The cleanroom robots transport black cassettes full of silicon wafers to the individual processing steps. The KUKA robot places the silicon wafers into the processing chamber with millimeter precision. At Infineon in Villach, Austria, 17 cleanroom robots of type LBR iiwa CR are in use. For cost-effective production, Infineon must always find the right balance between what is possible and what makes sense. The sensitive LBR iiwa CR does not require safety fencing during wafer handling. Lisa Ebner has been involved in the integration of the cleanroom robots into the automated production process from the very beginning.

Cobots enter the cleanrooms of the electronics industry. In the production of semiconductors, robots score high in reliability as well as top quality and safety standards.

The new form of human-machine interaction in cleanrooms

Cobots take automation in cleanrooms to a new level. In the production of micrometer-thin chips at Infineon in Villach, Austria, 17 sensitive KUKA lightweight robots work safely together with humans to ensure greater efficiency and safety when fabricating the precious and highly fragile wafers.

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