The world's first 20 nm particle counter for chemicals

July 12, 2016, Boulder, CO - Particle Measuring Systems (PMS) introduces the world's first and only 20 nm particle counter for ultrapure process chemicals. The Chem 20™ detects particles from 20 nm PSL or 9 nm gold.

With the advanced laser optics and detector technology from PMS, this innovative new product detects very small particles that could not be captured with previously available products. The Chem-20 features an onboard flow meter and bubble detector to optimize data quality and protect the sensor. The Chem 20 is available in two variants. Optimized for low or high refractive index chemicals being monitored, this significantly improves device performance and accuracy compared to existing technologies.

"The Chem 20 enables semiconductor manufacturers to detect particles that impact productivity and quality, which are not detectable with less sensitive technologies," said Brian Knollenberg, VP of Electronics at Particle Measuring Systems. He continued: "This helps them respond quickly to particle events long before surface analysis or yield data are available. With flexible installation options, the Chem 20 assists our customers in optimizing their process chemical systems from delivery to deployment, with improved statistics for stricter process control."

About Particle Measuring Systems

Particle Measuring Systems Inc. (PMS), a subsidiary of Spectris plc, is a global technology leader in environmental monitoring systems. PMS is the inventor of the laser particle counter and is today the leading provider of solutions for monitoring and controlling many forms of contamination that affect companies operating in extremely clean environments. For more information about PMS, visit our website pmeasuring.com.