Fine cleaning XXL on the way to California: "Mouth-friendly" dissected

Our cleaning system for the high-vacuum sector in the semiconductor industry for an American customer in California represented the final phase last year. The CNp system is equipped with two 700-liter treatment chambers, five media pre-forms with a total volume of approximately 5,000 liters, high-quality recirculation systems, multi-frequency ultrasound in both chambers, and suitable automation with a laminar flow tunnel and cleanroom connection.

An ambitious project, building on the experiences of the past eight years with many comparable systems. After a four-month installation period and an intensive commissioning and testing phase, LPW was able to conduct the preliminary acceptance together with the customer in the last days of December. Cleanliness requirements based on defined limits for organic-film contamination and residual atomic layers of certain substance groups pose a challenge in every respect to the materials used, manufacturing processes, and process engineering execution. Additionally, there were local requirements regarding electrical design, occupational safety, and considerations of the particular hazards posed by earthquakes in California. Weekly video conferences and online walkthroughs of key manufacturing milestones were part of the daily routine throughout the entire project phase.

After completion, at the beginning of the year, 33.5 tons of the system were disassembled into "suitable" transport pieces and shipped by container to the USA. In early April, the setup in California will begin, in collaboration with the active support of our North American SurfaceAlliance partners from Washtech. LPW – more than cleaning.