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Outgassing: The invisible threat to semiconductor purity

Key Facts at a Glance

– evolast® sets a new benchmark for semiconductor purity: engineered to deliver ultra-low outgassing performance that safeguards process integrity in critical plasma, thermal, and chemical manufacturing environments.
– The most advanced low-outgassing elastomer: evolast® ensures…

Outgassing unter Kontrolle – Reinheit in der Halbleiterfertigung sichern. (Copyright: Angst+Pfister Sensors and Power AG)

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Pfennig Reinigungstechnik GmbH Becker PMS HJM

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MEWA MT-Messtechnik ClearClean Vaisala